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Service & Support

Robotechnik Europe GmbH

www.robo-technik.eu

service@robo-technik.eu

Solar Technology

Wafer Inspection Modules

Wafer µ Cracks Inspection

Wafer µ Cracks inspection system
02-0000-01-00

Optical & Geometry

Wafer Optical & Geometry Inspection
02-0000-02-00

MDP life time measurement

Wafer MDP- Life time measurement
02-0000-07-00

Resistivity / PN measurement

Resistivity and PN system
02-0000-08-00

TTV, Bow & Saw mark

Wafer TTV, Bow & Saw mark
02-0000-09-00

MDP life time full size 2D mapping

MDP full size- 2D-life time mapping
02-0000-10-00

Cell Inspection Modules

Cell BS- Print- on the fly

Solar cell inspection for BS- print- Rear 1 / Rear2
03-0000-03-00

Cell FS- Print - on the fly

solar cell inspection for FS- Print
03-0000-01-01

Cell FS- Print Inspection

Solar cell inspection for FS- print
03-0001-02-01

Cell FS-Color & SinX coating

solar cell inspection for FS-color & SinX coating thickness
03-001-02-02

Cell FS- Print, Color & coating

solar cell Inspection for Print, color and SiNx coating
03-0001-02-03

Cell FS- Print and Color

solar cell inspection for- FS- Print & color
03-0001-02-04

Cell FS- Color Inspection

solar cell inspection for FS- color
03-0001-02-05

Cell BS- Print inspection

solar cell for Back Side- print- Rear1 & Rear2
03-0001-04-00

Cell EL- µ Cracks and Hot Spot

solar cell inspection for µ Cracks and Hot Spot
03-0001-09-00

Module Inspection System

Module Inspection System (MIS)

Solar module inspection system
07-9900-00-00

Semiconductor Technology

Automatic Process Equipment

Maximus 804

Automatic spinner for Coating including process and micro cluster system
51-005-02-00

Maximus 804 Lift-Off

Automatic lift-off cleaning spinner system including process and micro cluster system
51-005-02-LO

Maximus 806

Automatic spinner for Coating including process and micro cluster system
51-0005-04-00

Maximus 1203

Automatic spinner for Coating including process and micro cluster system
51-0005-06-00

MAXIMUS 6003

Automatic spinner for Coating including process and micro cluster system
51-0005-05-00

Laboratory RD Equipment

Spin Coating and Cleaning- OPTIspin SB20

Spin coating and cleaning system including process
51-0002-01-00

Spin coating and Cleaning-OPTIspin ST20

Stand alone spinner system including process
51-0002-03-00

Spin Coating and Cleaning-OPTIspin ST22

Stand alone spinner for coating and cleaning including process
51-0002-04-00

Spin coating and Cleaning- OPTIspin ST22+

Stand alone spinner system for coating and cleaning including process
51-0002-05-00

Spin Coating and Cleaning- OPTIspin ST23

Stand alone spinner system for coating and cleaning including process
51-0002-06-00

Spin Coating and Cleaning- OPTIspin ST23+

Stand alone spinner system for coating and cleaning including process
51-0002-07-00

Spin Coating- OPTIspin SB30

Bench mounted spinner system including process
51-0002-08-00

Spin Coating- OPTIspin ST30

Stand alone spinner system for Coating including process
51-0002-09-00

Spin Coating- OPTIspin ST32

Stand alone spinner for coating including process
51-0002-10-00

Spin Coating- OPTIspin ST32+

Stand alone spinner system for Coating including process
51-0002-11-00

Spin Coating- OPTIcoat SB20

Bench mounted spinner system including process
51-0003-01-00

Spin Coating- OPTIcoat ST20

Stand alone spinner for coating including process
51-0003-01-02

Spin Coating- OPTIcoat ST22

Stand alone spinner for coating including process
51-0003-01-03

Spin Coating- OPTIcoat ST22+

Stand alone spinner for coating including process
51-0003-01-04

Spin Coating- OPTIcoat ST23

Stand alone spinner for coating including process
51-0003-01-05

Spin Coating- OPTIcoat ST23+

Stand alone spinner for coating including process
51-0003-01-06

Spin Coating- OPTIcoat SB30

Bench mounted spinner system including process
51-0003-01-07

Spin Coating- OPTIcoat ST30

Stand alone spinner for coating including process
51-0003-01-09

Spin Coating- OPTIcoat ST32

Stand alone spinner for coating including process
51-0003-01-10

Spin Coating- OPTIcoat ST32+

Stand alone spinner for coating including process
51-0003-01-11

Spin Coating- OPTIcoat ST60

Stand alone spinner for coating including process
51-0003-01-12

Spin Coating- OPTIcoat ST75

Stand alone spinner for coating including process
51-0003-01-13

Spray Coating- DOMINUS Coater ST 20i

Stand alone spray coating systemfor Coating including process

Spray Coating- DOMINUS Coater ST22i

Stand alone spray coating system for coating including process

Spray Coating- DOMINUS Coater ST30i

Stand alone spray coating system for coating including process

Spin Wet- OPTIwet ST 30

Stand alone spinner for wet process

Spin Wet- OPTIwet ST 60

Stand alone spinner for wet process

Spin Wet- OPTIwet ST 75

Stand alone spinner for wet process

Hotplate- OPTIhot HB20

Bench mounted hotplate system including process
51-0004-01-00

Hotplate- OPTIhot SHT20

Stand alone hotplate
51-0004-02-00

Hotplate- OPTIhot HB20+

Bench mounted hotplate system including process
51-0004-03-00

Hotplate- OPTIhot SHT20+

Stand alone hotplate
51-0004-04-00

Hotplate HMDS- OPTIhot VB20

Bench mounted HMDS hotplate
51-0004-05-00

Hotplate HMDS- OPTIhot SVT20

Stand alone hotplate HMDS
51-0004-06-00

Hotplate- OPTIhot HB30+

Bench mounted hotplate system including process
51-0004-07-00

Hotplate- OPTIhot SHT30+

Stand alone hotplate
51-0004-08-00

Low cost Equipment

Spinner module- primus SB15

Spinner module primus SB15 including process
51-0001-01-00

Spinner module- primus STT15

Spinner module- primus STT15 including process
51-0001-02-00