The ATMgroup is prepared to share its experience with the semiconductor industry and its sound top-grade know-how of engineering, which it has been collecting over the years.

ATM is one of the world's leading manufacturers of automated processing units and manual modules for lithographic processing as well as for lithography-linked procedures as e.g. wet-processes for developing, cleaning or etching.

Standardized resp. Customized Solutions

Our product range comprises everything: from laboratory equipment to fully automated processing devices for various throughputs.

ATM's modular unit design is one of the unique problem solutions ATM offers due to our innovative engineering and excellent know-how of a variety of clean-room assembly procedures. Our product portfolio contains modules from laboratory scale up to fully automated assembly units for processing wafers or substrates for the semiconductor industry, opto-electronics, MEMs, photovoltaics, display technology and sensor systems.