ATMgroup
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Robotechnik Europe GmbH

www.robo-technik.eu

service@robo-technik.eu

 

Halbleiter / Semiconductor

Innovation in der Halbleitertechnologie

ATMgroup bietet Ihnen jahrelange Erfahrung in der Halbleiter-Industrie, detalliertes Know-How auf technologisch hohem Niveau.

ATM ist ein weltweit führender Hersteller von automatischen Prozessanlagen und manuellen Modulen für die Lithographie-Bearbeitung sowie für Prozesse am Rande der Lithographie wie z.B. Nassprozesse zum Entwickeln, Reinigen oder Ätzen.

Standard oder Sonderlösungen. Die Produktpalette reicht von Laborausstattungen bis hin zu vollautomatischen Verarbeitungsgeräten für underschiedliche Durchsätze.

ATM bietet seinen Kunden einzigartige Problemlösungen, wie ein modulares Systemdesign, durch innovatives Engineering sowie exzellentes Know-how der verschiedenen Reinraum-Produktionsprozesse. Das Produktportfolio umfasst Labormodule bis hin zu vollautomatischen Produktionsanlagen zum Prozessieren von Wafern oder Substraten für die Halbleiterindustrie, Opto-Elektronik, MEMS, Photovoltaik, Displaytechnologie und Sensorik.

 
Automatic Process Equipment

Maximus 804

Automatic spinner for Coating including process and micro cluster system
51-005-02-00
Weiter

Maximus 804 Lift-Off

Automatic lift-off cleaning spinner system including process and micro cluster system
51-005-02-LO
Weiter

Maximus 806

Automatic spinner for Coating including process and micro cluster system
51-0005-04-00
Weiter

Maximus 1203

Automatic spinner for Coating including process and micro cluster system
51-0005-06-00
Weiter
 

MAXIMUS 6003

Automatic spinner for Coating including process and micro cluster system
51-0005-05-00
Weiter

 
Laboratory R&D Equipment

Spin Coating and Cleaning- OPTIspin SB20

Spin coating and cleaning system including process
51-0002-01-00
Weiter

Spin coating and Cleaning-OPTIspin ST20

Stand alone spinner system including process
51-0002-03-00
Weiter

Spin Coating and Cleaning-OPTIspin ST22

Stand alone spinner for coating and cleaning including process
51-0002-04-00
Weiter

Spin coating and Cleaning- OPTIspin ST22+

Stand alone spinner system for coating and cleaning including process
51-0002-05-00
Weiter
 

Spin Coating and Cleaning- OPTIspin ST23

Stand alone spinner system for coating and cleaning including process
51-0002-06-00
Weiter

Spin Coating and Cleaning- OPTIspin ST23+

Stand alone spinner system for coating and cleaning including process
51-0002-07-00
Weiter

Spin Coating- OPTIspin SB30

Bench mounted spinner system including process
51-0002-08-00
Weiter

Spin Coating- OPTIspin ST30

Stand alone spinner system for Coating including process
51-0002-09-00
Weiter
 

Spin Coating- OPTIspin ST32

Stand alone spinner for coating including process
51-0002-10-00
Weiter

Spin Coating- OPTIspin ST32+

Stand alone spinner system for Coating including process
51-0002-11-00
Weiter

Spin Coating- OPTIcoat SB20

Bench mounted spinner system including process
51-0003-01-00
Weiter

Spin Coating- OPTIcoat ST20

Stand alone spinner for coating including process
51-0003-01-02
Weiter
 

Spin Coating- OPTIcoat ST22

Stand alone spinner for coating including process
51-0003-01-03
Weiter

Spin Coating- OPTIcoat ST22+

Stand alone spinner for coating including process
51-0003-01-04
Weiter

Spin Coating- OPTIcoat ST23

Stand alone spinner for coating including process
51-0003-01-05
Weiter

Spin Coating- OPTIcoat ST23+

Stand alone spinner for coating including process
51-0003-01-06
Weiter
 

Spin Coating- OPTIcoat SB30

Bench mounted spinner system including process
51-0003-01-07
Weiter

Spin Coating- OPTIcoat ST30

Stand alone spinner for coating including process
51-0003-01-09
Weiter

Spin Coating- OPTIcoat ST32

Stand alone spinner for coating including process
51-0003-01-10
Weiter

Spin Coating- OPTIcoat ST32+

Stand alone spinner for coating including process
51-0003-01-11
Weiter
 

Spin Coating- OPTIcoat ST60

Stand alone spinner for coating including process
51-0003-01-12
Weiter

Spin Coating- OPTIcoat ST75

Stand alone spinner for coating including process
51-0003-01-13
Weiter

Spray Coating- DOMINUS Coater ST 20i

Stand alone spray coating systemfor Coating including process
Weiter

Spray Coating- DOMINUS Coater ST22i

Stand alone spray coating system for coating including process
Weiter
 

Spray Coating- DOMINUS Coater ST30i

Stand alone spray coating system for coating including process
Weiter

Spin Wet- OPTIwet ST 30

Stand alone spinner for wet process
Weiter

Spin Wet- OPTIwet ST 60

Stand alone spinner for wet process
Weiter

Spin Wet- OPTIwet ST 75

Stand alone spinner for wet process
Weiter
 

Hotplate- OPTIhot HB20

Bench mounted hotplate system including process
51-0004-01-00
Weiter

Hotplate- OPTIhot SHT20

Stand alone hotplate
51-0004-02-00
Weiter

Hotplate- OPTIhot HB20+

Bench mounted hotplate system including process
51-0004-03-00
Weiter

Hotplate- OPTIhot SHT20+

Stand alone hotplate
51-0004-04-00
Weiter
 

Hotplate HMDS- OPTIhot VB20

Bench mounted HMDS hotplate
51-0004-05-00
Weiter

Hotplate HMDS- OPTIhot SVT20

Stand alone hotplate HMDS
51-0004-06-00
Weiter

Hotplate- OPTIhot HB30+

Bench mounted hotplate system including process
51-0004-07-00
Weiter

Hotplate- OPTIhot SHT30+

Stand alone hotplate
51-0004-08-00
Weiter
 

 
Low cost Equipment

Spinner module- primus SB15

Spinner module primus SB15 including process
51-0001-01-00
Weiter

Spinner module- primus STT15

Spinner module- primus STT15 including process
51-0001-02-00
Weiter
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