Product data sheet

Optical & Geometry

Article number: 02-0000-02-00

Wafer optical and geometry inspection system:

The ATM optical and geometry inspection system is a fast, non-contact technology and very small and easy to use system to detect defects in wafers for solar production application.

Types of defects:

- Wafer geometry
- Cracks
- Stains
- Holes
- Finger prints
- Chipping
- V-shaped


  • 3600 wafers/h
  • Non contact
  • Very small and easy to use
  • SHR- camera
  • Ethernet tools
  • Remote control
  • Intelligent software
  • Connection to the master PC
  • And more

Optical Wafer Inspection:

Surface Inspection / OWI-1
for water stains, fingerprints, chipping and more
Article number: 02-0000-02-01

Geometry Inspection / OWI-2
For wafer geometry, V-shaped, missing parts, cracks, holes and more
Article number: 02-0000-02-02

Geometry and Surface Inspection / OWI- 1 und 2
For water stains, fingerprints, geometry, V-shaped, missing parts, cracks, holes,  chipping
Article number.: 02-0000-02-003

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