The future technology in the semiconductor industry and production-
Spinner module within process:

PRIMUS SB 15

• Bench mounted spin coating or drying system for wafers up to Ø 6" (Ø 150 mm) and substrates up to 5" x 5" (127 mm x 127 mm)

System consists of:

• Spinner module with process bowl cover
• Integrated holding device for tube OD 6 mm
• Input control unit with up to 20 programmable recipes, each with 4 programmable recipe steps
• Including an ENGLISH manual on standard paper and a CD-ROM
• Price without installation and training
• Requires at least one chuck (not included)

Technical Data:

• Voltage: UAC= 230 V / N / PE / 50 Hz (60 Hz) / 16A
• Speed: 1 up to 6.000 rpm - adjustable in 1 rpm steps
• Acceleration ramp: adjustable in 1 up to 10 steps
• Spinning time: 1 up to 999 s - Adjustable in 0.1 s steps
• Substrate size: up to Ø 6" (Ø 150 mm) or 5" x 5" (127 mm x 127 mm)
• Process bowl: made of Polypropylene (PP)
• Vacuum: -0.8 ± 0.2 bar
• CE marked system
• Connection for waste bottle - Outer diameter (Ø) 34 mm

Chucks: option