Wafer optical and geometry inspection system:
The ATM optical and geometry inspection system is a fast, non-contact technology and very small and easy to use system to detect defects in wafers for solar production application.
Types of defects:
- Wafer geometry
- Cracks
- Stains
- Holes
- Finger prints
- Chipping
- V-shaped
Features:
Optical Wafer Inspection:
Surface Inspection / OWI-1
for water stains, fingerprints, chipping and more
Article number: 02-0000-02-01
Geometry Inspection / OWI-2
For wafer geometry, V-shaped, missing parts, cracks, holes and more
Article number: 02-0000-02-02
Option:
Geometry and Surface Inspection / OWI- 1 und 2
For water stains, fingerprints, geometry, V-shaped, missing parts, cracks, holes, chipping
Article number.: 02-0000-02-003