Wafer optical and geometry inspection system:

The ATM optical and geometry inspection system is a fast, non-contact technology and very small and easy to use system to detect defects in wafers for solar production application.

Types of defects:

- Wafer geometry
- Cracks
- Stains
- Holes
- Finger prints
- Chipping
- V-shaped

Features:

• 3600 wafers/h
• Non contact
• Very small and easy to use
• SHR- camera
• Ethernet tools
• Remote control
• Intelligent software
• Connection to the master PC
• And more

Optical Wafer Inspection:

Surface Inspection / OWI-1
for water stains, fingerprints, chipping and more
Article number: 02-0000-02-01

Geometry Inspection / OWI-2
For wafer geometry, V-shaped, missing parts, cracks, holes and more
Article number: 02-0000-02-02

Option:
Geometry and Surface Inspection / OWI- 1 und 2
For water stains, fingerprints, geometry, V-shaped, missing parts, cracks, holes,  chipping
Article number.: 02-0000-02-003