Product data sheet

Wafer µ Cracks Inspection

Article number: 02-0000-01-00

Wafer micro cracks inspection system:

The ATM micro cracks inspection system is a fast, non-contact technology and very small and easy to use system to detect defects in wafers for solar production application.

Types of defects:

- Micro cracks
- Cracks
- Holes
- Inclusion


  • 3600 wafers/h
  • Non contact
  • Very small and easy to use
  • Halogen light within fiber glass
  • SHR- camera
  • Ethernet tools
  • Remote control
  • Intelligent software
  • Connection to the master PC
  • And more