ATMgroup

 
Solar Technology

 
Ingot/Bricks Inspection Systems

3D- Bricks Chamfer measurement

3D Ingot/Bricks Chamfers inspection- 4 side
01-0000-01-00
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3D Bricks geometry&surface inspection

3D Ingot/Bricks geometry and surface- 4 side
01-0000-02-00
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IR Bricks inspection and PN junction

IR Ingot/Bricks cracks/inclusio/defects, PN Junction- 4 side
01-0000-03-00
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Ingot/Bricks resistivity / PN measurement

Bricks resistivity and PN measurement system- 4 side
01-0000-04-00
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Ingot/Bricks MDP life time measurement

Bricks MDP life time measurement system
01-0000-05-00
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Ingot/Bricks MDP life time- full size 2D mapping

Bricks MDP full size- 2D-life time mapping
01-0000-06-00
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Ingot/Bricks Automation System - BIS

Bricks inspection machine within manual loading

Ingot/Bricks Inspection machine, 4 side automation
01-9900-03-00
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Bricks inspection automatically loading

Ingot/Bricks Inspection machine, 4 side automation
01-9900-03-01
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Wafer Inspection Systems

Wafer µ Cracks Inspection

Wafer µ Cracks inspection system
02-0000-01-00
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Optical & Geometry

Wafer Optical & Geometry Inspection
02-0000-02-00
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MDP life time measurement

Wafer MDP- Life time measurement
02-0000-07-00
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Resistivity / PN measurement

Resistivity and PN system
02-0000-08-00
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TTV, Bow & Saw mark

Wafer TTV, Bow & Saw mark
02-0000-09-00
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MDP life time full size 2D mapping

MDP full size- 2D-life time mapping
02-0000-10-00
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Wafer Tester and Sorter System - WIS

 
WIS- Tester and Sorter- automation technology

Wafer Inspection System- WIS

Metrology for Wafers including Loader, Sorter, Inspection
04-9900-00-00
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Sorter / Loader Units

Wafer Stacks Loader

Metrology for wafer production- wafer stacks loader
04-9900-00-01
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Wafer Stacks Sorter

Metrology for wafer production- wafer stacks sorter
04-9900-00-02
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Wafer Cassettes Loader

Metrology for wafer production- wafer cassettes loader
04-9900-00-04
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Wafer Cassettes Sorter

Metrology for wafer production- wafer cassettes sorter
04-9900-00-05
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Wafer 1:5 Belt Converter and Stacks Sorter

Wafer 1:5 belt converter within sorter system
04-9900-00-07
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Wafer 1:10 Belt Converter and Stacks Sorter

Wafer 1:10 belt converter within sorter system
04-9900-00-08
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Inspection Unit

Master PC for all connected system

Master PC for loader, sorter and inspection systems
04-9900-00-03
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Wafer 90º turning system

Wafers 90° turning robot for inspection systems
04-9900-00-12
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Wafer micro belt system for wafer

Wafer transport belt within micro belt technology
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Cell Inspection Systems

Cell BS- Print- on the fly

Solar cell inspection for BS- print- Rear 1 / Rear2
03-0000-03-00
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Cell FS- Print - on the fly

solar cell inspection for FS- Print
03-0000-01-01
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Cell FS- Print Inspection

Solar cell inspection for FS- print
03-0001-02-01
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Cell FS-Color & SinX coating

solar cell inspection for FS-color & SinX coating thickness
03-001-02-02
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Cell FS- Print, Color & coating

solar cell Inspection for Print, color and SiNx coating
03-0001-02-03
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Cell FS- Print and Color

solar cell inspection for- FS- Print & color
03-0001-02-04
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Cell FS- Color Inspection

solar cell inspection for FS- color
03-0001-02-05
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Cell BS- Print inspection

solar cell for Back Side- print- Rear1 & Rear2
03-0001-04-00
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Cell 3D- Grid measurement

solar cell inspection for FS- 3D- Grid measurement
03-0001-06-00
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Cell EL- µ Cracks and Hot Spot

solar cell inspection for µ Cracks and Hot Spot
03-0001-09-00
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Cell 3D- Bow measurement

solar cell inspection for 3D
03-001-13-00
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Cell Tester and Sorter System - CIS

 
CIS-Tester and sorter- automation technology

Cell Tester and Sorter System - CIS

Cell tester/sorter including inspection
05-9900-00-00
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Sorter / Loader Units

Cell Stacks Loader

Solar cell loader for cell production- cell stacks loader
05-9900-00-01
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Cell Stacks Sorter

Solar cell sorter for cell production- cell stacks sorter
05-9900-00-02
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Cell Cassettes Loader

Solar cell loader for cell production- cell cassettes loader
05-9900-00-04
more

Cell Cassettes Sorter

Solar cell loader for cell production- cell cassettes sorter
05-9900-00-05
more
 

 
Inspection Unit

Master PC for all connected systems

Master pc for loader, sorter and inspection systems
05-9900-00-03
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Cell micro belt system

Cell transport belt within micro belt technology
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String Automation System - Layup

Layup- String Inspection System - SIS

Layup string machine including loader,sorter and inspection
06-9900-00-00
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Module Automation System - MIS

Module Inspection System MIS- manual loading

Solar module inspection machine for EL & optical-manual loading
07-9900-00-00
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Module Inspection MIS- automatic loading

Module inspection machine for automatic loading including inspection
07-9900-00-01
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Module Inspection System- Master PC

Master PC for module inspection system
07-9900-00-02
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Semiconductor Technology

 
Automatic Process Equipment

Automatic Spin Coating- Maximus 804

Automatic spinner for Coating including process and micro cluster system
51-005-02-00
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Automatic Spin Coating- Maximus 804, Lift-Off

Automatic lift-off cleaning spinner system including process and micro cluster system
more

Automatic Spin Coating- Maximus 805

Automatic spinner for Coating including process and micro cluster system
51-0005-03-00
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Automatic Spin Coating- Maximus 806

Automatic spinner for Coating including process and micro cluster system
51-0005-04-00
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Automatic Spin Coating and Cleaning- MAXIMUS 6003

Automatic spinner for Coating including process and micro cluster system
51-0005-05-00
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Laboratory RD Equipment

Spin Coating and Cleaning- OPTIspin SB20

Spin coating and cleaning system including process
51-0002-01-00
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Spin coating and Cleaning-OPTIspin ST20

Stand alone spinner system including process
51-0002-03-00
more

Spin Coating and Cleaning-OPTIspin ST22

Stand alone spinner for coating and cleaning including process
51-0002-04-00
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Spin coating and Cleaning- OPTIspin ST22+

Stand alone spinner system for coating and cleaning including process
51-0002-05-00
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Spin Coating and Cleaning- OPTIspin ST23

Stand alone spinner system for coating and cleaning including process
51-0002-06-00
more

Spin Coating and Cleaning- OPTIspin ST23+

Stand alone spinner system for coating and cleaning including process
51-0002-07-00
more

Spin Coating- OPTIspin SB30

Bench mounted spinner system including process
51-0002-08-00
more

Spin Coating- OPTIspin ST30

Stand alone spinner system for Coating including process
51-0002-09-00
more
 

Spin Coating- OPTIspin ST32

Stand alone spinner for coating including process
51-0002-10-00
more

Spin Coating- OPTIspin ST32+

Stand alone spinner system for Coating including process
51-0002-11-00
more

Spin Coating- OPTIcoat SB20

Bench mounted spinner system including process
51-0003-01-00
more

Spin Coating- OPTIcoat ST20

Stand alone spinner for coating including process
51-0003-01-02
more
 

Spin Coating- OPTIcoat ST22

Stand alone spinner for coating including process
51-0003-01-03
more

Spin Coating- OPTIcoat ST22+

Stand alone spinner for coating including process
51-0003-01-04
more

Spin Coating- OPTIcoat ST23

Stand alone spinner for coating including process
51-0003-01-05
more

Spin Coating- OPTIcoat ST23+

Stand alone spinner for coating including process
51-0003-01-06
more
 

Spin Coating- OPTIcoat SB30

Bench mounted spinner system including process
51-0003-01-07
more

Spin Coating- OPTIcoat ST30

Stand alone spinner for coating including process
51-0003-01-09
more

Spin Coating- OPTIcoat ST32

Stand alone spinner for coating including process
51-0003-01-10
more

Spin Coating- OPTIcoat ST32+

Stand alone spinner for coating including process
51-0003-01-11
more
 

Spin Coating- OPTIcoat ST60

Stand alone spinner for coating including process
51-0003-01-12
more

Spin Coating- OPTIcoat ST75

Stand alone spinner for coating including process
51-0003-01-13
more

Spray Coating- DOMINUS Coater ST 20i

Stand alone spray coating systemfor Coating including process
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Spray Coating- DOMINUS Coater ST22i

Stand alone spray coating system for coating including process
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Spray Coating- DOMINUS Coater ST30i

Stand alone spray coating system for coating including process
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Spin Wet- OPTIwet SB 30 extended

Stand alone spinner for wet process
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Spin Wet- OPTIwet ST 30

Stand alone spinner for wet process
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Spin Wet- OPTIwet ST 60

Stand alone spinner for wet process
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Spin Wet- OPTIwet ST 75

Stand alone spinner for wet process
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Hotplate- OPTIhot HB20

Bench mounted hotplate system including process
51-0004-01-00
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Hotplate- OPTIhot SHT20

Stand alone hotplate
51-0004-02-00
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Hotplate- OPTIhot HB20+

Bench mounted hotplate system including process
51-0004-03-00
more
 

Hotplate- OPTIhot SHT20+

Stand alone hotplate
51-0004-04-00
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Hotplate HMDS- OPTIhot VB20

Bench mounted HMDS hotplate
51-0004-05-00
more

Hotplate HMDS- OPTIhot SVT20

Stand alone hotplate HMDS
51-0004-06-00
more

Hotplate- OPTIhot HB30+

Bench mounted hotplate system including process
51-0004-07-00
more
 

Hotplate- OPTIhot SHT30+

Stand alone hotplate
51-0004-08-00
more

 
Low cost Equipment

Spinner module- primus SB15

Spinner module primus SB15 including process
51-0001-01-00
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Spinner module- primus STT15

Spinner module- primus STT15 including process
51-0001-02-00
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Montageautomatisierung

 
Micro Assembling Technology

 
Automatic Assembling

 
Module Assembling