Core Technology for the wafer production:
The Wafer Cassettes Loader Module

Features:

• Sensor Technology
• Connected to the master PC
• Including statistics, DB and communication with Ethernet
• Remote control
• Tested and calibrated

Automation:

• Up to 3600 wafer/h, - mono and multi
• ATM Cassettes loader for different kind of cassettes
• Standard communication interface (option: MES)
• Operator panels
• Wafer sizes 125 x 125 mm or 156 x 156 mm, mono or poly
• Integrated electronic control system and servo motor
• Micro belt
• Less contact grabber
• Cassettes changing without reducing the cycle time
• Fully automatic removable stacks
• ATM Buffer Technology

Capacity:

• Up to 5/10 cassettes (depend of cassettes size)
• Option: Barcode scanning
• Cassettes loader for 25, 50, 75, 100 wafers cassettes