ATMgroup

Product data sheet

Spinner module- primus SB15

Article number: 51-0001-01-00

The future technology in the semiconductor industry and production-
Spinner module within process:

PRIMUS SB 15

  • Bench mounted spin coating or drying system for wafers up to Ø 6" (Ø 150 mm) and substrates up to 5" x 5" (127 mm x 127 mm)

System consists of:

  • Spinner module with process bowl cover
  • Integrated holding device for tube OD 6 mm
  • Input control unit with up to 20 programmable recipes, each with 4 programmable recipe steps
  • Including an ENGLISH manual on standard paper and a CD-ROM
  • Price without installation and training
  • Requires at least one chuck (not included)

Technical Data:

  • Voltage: UAC= 230 V / N / PE / 50 Hz (60 Hz) / 16A
  • Speed: 1 up to 6.000 rpm - adjustable in 1 rpm steps
  • Acceleration ramp: adjustable in 1 up to 10 steps
  • Spinning time: 1 up to 999 s - Adjustable in 0.1 s steps
  • Substrate size: up to Ø 6" (Ø 150 mm) or 5" x 5" (127 mm x 127 mm)
  • Process bowl: made of Polypropylene (PP)
  • Vacuum: -0.8 ± 0.2 bar
  • CE marked system
  • Connection for waste bottle - Outer diameter (Ø) 34 mm

Chucks: option