Micro belt system:

The MBS - belt is developed for wafer transport within mico technology.
The MBC - belt transfers wafers with high speed and very exact micro all inspection systems, loader and sorter.

The ATM micro belt PC is a soft- and hardware technology for inspection systems. It is a system very easy to use. This system is developed for the solar production application.

- Servo motors
- Intelligent hardware
- Intelligent software