Core Technology for the wafer production:
The Wafer 1:5 Belt Conver and Sorter Module
Features:
On the fly (without stopping)
- Sensor Technology
- Connected to the master PC
- Including statistics, DB and communication with Ethernet
- Remote control
- Tested and calibrated
Automation:
- Up to 3600 wafer/h, - mono and multi
- Belt converter and stacks sorter
- Standard communication interface (option: MES)
- Operator panels
- Wafer sizes 125 x 125 mm or 156 x 156 mm, mono or poly
- Integrated electronic control system and servo motor
- Less contact grabber
- 3 sorter-classes
- On the fly (without stopping)
- Fully automatic removable stacks
- Sorter within ATM stacks, 3 classes à 150 wafers per stack
- Connected to the chemical process machine within 5 belts