Core Technology for the wafer production:
The Wafer Stacks Loader Module

Features:

• Sensor Technology
• Connected to the master PC
• Including statistics, DB and communication with Ethernet
• Remote control
• Tested and calibrated

Automation:

• Up to 3600 wafer/h, - mono and multi
• On the fly without stopping
• Operator panels
• Wafer sizes 125 x 125 mm or 156 x 156 mm, mono or poly
• Integrated electronic control system and servo motor
• Micro belt
• Less contact grabber
• Up to 12 loader stacks
• Stacks changing without reducing the cycle time
• On the fly (without stopping)
• Fully automatic removable stacks
• Loader within 6/12 stacks à 150 wafers per stack

Capacity:

• Up to 3600 wafers capacity for one loader
• Operation with up to 3 stacks loader modules possible (up to 10800 wafers capactiy)
• Option: Barcode scanning